Site n'echiche ndị ọkachamara, usoro mmepụta nke mgbawa dị oke mgbagwoju anya ma na-agwụ ike. Otú ọ dị, site na usoro mmepụta ihe zuru ezu nke IC, a na-ekewa ya na akụkụ anọ: IC design → IC manufactured → packaging → test.
Usoro mmepụta mgbawa:
1. Chip imewe
Ihe mgbawa bụ ngwaahịa nwere obere olu mana oke oke. Iji mee mgbawa, imewe bụ akụkụ nke mbụ. Nhazi ahụ chọrọ enyemaka nke mgbawa nhazi nke mgbawa nke a chọrọ maka nhazi site n'enyemaka nke ngwá ọrụ EDA na ụfọdụ isi IP.
Usoro mmepụta mgbawa:
1. Chip imewe
Ihe mgbawa bụ ngwaahịa nwere obere olu mana oke oke. Iji mee mgbawa, imewe bụ akụkụ nke mbụ. Nhazi ahụ chọrọ enyemaka nke mgbawa nhazi nke mgbawa nke a chọrọ maka nhazi site n'enyemaka nke ngwá ọrụ EDA na ụfọdụ isi IP.
3. Silicon - ebuli
Mgbe e kewasịrị silicon ahụ, a na-ahapụ ihe ndị fọdụrụnụ. Silikoni dị ọcha mgbe ọtụtụ usoro ruru ogo nrụpụta semiconductor. Nke a bụ ihe a na-akpọ silicon electronic.
4. Silicon - nkedo ingots
Mgbe emechara, a ga-atụba silicon n'ime ingots silicon. Otu kristal nke silicon-ọkwa eletrọnịkị mgbe etinyechara ya na ingot na-atụ ihe dịka 100 kg, ịdị ọcha nke silicon ruru 99.9999%.
5. Nhazi faịlụ
Mgbe a wụchara silicon ingot, a ga-egbutusị silicon ingot niile, nke bụ wafer nke anyị na-akpọkarị wafer, nke dị gịrịgịrị. Mgbe nke ahụ gasịrị, a na-ehicha wafer ahụ ruo mgbe o zuru oke, na elu dị nro dị ka enyo.
Dayameta nke silicon wafers bụ 8-inch (200mm) na 12-inch (300mm) na dayameta. Nnukwu dayameta ahụ, ọnụ ahịa nke otu mgbawa na-ebelata, mana ọ na-esiwanye ike nhazi.
5. Nhazi faịlụ
Mgbe a wụchara silicon ingot, a ga-egbutusị silicon ingot niile, nke bụ wafer nke anyị na-akpọkarị wafer, nke dị gịrịgịrị. Mgbe nke ahụ gasịrị, a na-ehicha wafer ahụ ruo mgbe o zuru oke, na elu dị nro dị ka enyo.
Dayameta nke silicon wafers bụ 8-inch (200mm) na 12-inch (300mm) na dayameta. Nnukwu dayameta ahụ, ọnụ ahịa nke otu mgbawa na-ebelata, mana ọ na-esiwanye ike nhazi.
7. Eclipse na ion injection
Mbụ, ọ dị mkpa ka corrode silicon oxide na silicon nitride kpughere n'èzí photoresist, na precipitate a oyi akwa nke silicon ka ikpuchi n'etiti kristal tube, na mgbe ahụ na-eji etching technology ikpughe silicon ala. Mgbe ahụ, gbanye boron ma ọ bụ phosphorus n'ime usoro silicon, wee jupụta ọla kọpa iji jikọọ na transistor ndị ọzọ, wee tinye akwa ọzọ nke gluu na ya iji mee ihe nhazi. N'ozuzu, mgbawa nwere ọtụtụ ọkwa dị ka okporo ụzọ nwere njikọ chiri anya.
7. Eclipse na ion injection
Mbụ, ọ dị mkpa ka corrode silicon oxide na silicon nitride kpughere n'èzí photoresist, na precipitate a oyi akwa nke silicon ka ikpuchi n'etiti kristal tube, na mgbe ahụ na-eji etching technology ikpughe silicon ala. Mgbe ahụ, gbanye boron ma ọ bụ phosphorus n'ime usoro silicon, wee jupụta ọla kọpa iji jikọọ na transistor ndị ọzọ, wee tinye akwa ọzọ nke gluu na ya iji mee ihe nhazi. N'ozuzu, mgbawa nwere ọtụtụ ọkwa dị ka okporo ụzọ nwere njikọ chiri anya.
Oge nzipu: Jul-08-2023
